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Scanning Electron Microscope
Quanta 200, FEI Company
Core Imaging Facility

Quanta SEM

The FEI Quanta 200 is a versatile high performance, low-vacuum scanning electron microscope with a tungsten electron source.  It can be operated in three different vacuum modes, High Vacuum (HV), Low vacuum (LV) and Environmenal mode (ESEM), thus accommodate a wide range of sample of any SEM system.  High vacuum or conventional mode may be used to examine dry conductive specimens. Low vacuum (0.1-1.0 Torr) mode may be used to examine dry specimens that are not inherently conductive and will not tolerate normal coating procedures. Environmental (1.0 – 20 Torr) or wet mode maintains humidity  around the specimen whereby enabling examination of hydrated specimens. The Quanta 200 is also equipped with a Gatan Cryo transfer unit (ALTO2100). All images are acquired digitally.

Features and Specifications

Electron Optics
Source: Tungsten hairpin filament.
Voltage: 200 V to 30 kV
Beam Current: <2 µA

Resolution
SE resolution: 3.0 nm at 30 kV in high-vacuum, low-vacuum and ESEM operating modes;
10 nm at 3 kV in high-vacuum mode
<12 nm at 3 kV in low-vacuum mode
BSE resolution: 4.0 nm at 30 kV

Vacuum
High-vacuum mode (typically 10-5 mbar) for imaging of conductive and/or conventionally prepared specimens;
Low-vacuum mode (<1.3 mbar) for imaging of non-conductive specimens without preparation;
ESEM™ mode (<26 mbar = 2600 Pa = 20 Torr) for high-vacuum incompatible specimens which are impossible to investigate with traditional EM methods.

Sample Navigation
motorized x-y-z-rotate stage, providing the following movements:
x = y = 50 mm (motorized)
z = 25 mm (motorized)
Z = 25 mm (manual)
Tilt +75 degrees to –15 degrees (manual)
Tilt eucentric at analytical working distance of 10 mm

Focus Range:  3 – 99 mm
Magnification 6x (at longest working distance) to >1,000,000x
Field of View Identical field of view in high- and low-vacuum modes (18 mm at the longest working distance)
500 µm with standard, axial, gaseous secondary electron (SE) detector

Scanning System
The Quanta 200 provides a flexible scanning system controlled from the graphical user interface:
- Pixel density 512 x 442, 1024 x 884, 2048 x 1768 or 4096 x 3536, selectable;
- Minimum dwell time 50 ns/pixel; maximum 1 ms/pixel.
- Electronic scan rotation by n x 360 degrees.

Detector Systems
The Quanta 200 is equipped with several secondary electron detectors (SED, LF-GSED and GSED), that are optimized for use in high-vacuum, low-vacuum and ultra-low vacuum (ESEM) chamber environments.
STEM detector can be used for imaging of TEM prepared samples.

Imaging
Images are displayed in an area of 1024 x 884 pixels, configurable for either single-frame or four-quadrant display. Images can be viewed live, averaged or integrated.


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